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Practical Guide to Surface MetrologyMichael QuintenPreface1 Introduction to Surfaces and Surface Metrology1.1 Microscopic View on a Surface1.2 Macroscopic View on a Surface1.3 Measurement and Validation1.4 The Way To Reliable Surface Data2 Tactile Surface Metrology2.1 Tactile Surface Profiling2.2 Atomic Force Microscopy3 Capacitive And Inductive Surface Metrology3.1 Capacitive Surface Profiling3.2 Surface Profiling With Eddy Currents4 Optical Surface Metrology4.1 Physical Basics4.1.1 Electromagnetic waves4.1.2 Huygens-Fresnel principle of wave propagation4.1.3 Polarization4.1.4 Interference4.1.5 Coherence4.1.6 Dielectric Function and Refractive Index4.1.7 Reflection and Refraction4.1.8 Dispersion Effects4.1.9 Diffraction4.1.10 Scattering4.2 Chromatic Confocal Surface Profiling4.3 Surface Profiling with an Autofocus Sensor4.4 Light Sectional Methods4.4.1 Triangulation4.4.2 Line Projection4.4.3 Fringe Projection4.5 Microscopy Methods4.5.1 Classical Microscopy4.5.2 Confocal Microscopy4.5.3 Focal Depth Variation4.5.4 Scanning Near-Field Optical Microscopy4.6 Interferometric Methods4.6.1 Interferometric Form Inspection18.104.22.168 Form inspection of planar surfaces22.214.171.124 Form inspection of spherical, aspherical and freeform surfaces4.6.2 Tilted Wave Interferometry4.6.3 White Light Interferometry4.6.4 Multi-Wavelength Interferometry4.6.5 Grazing Incidence Interferometry4.6.6 Digital Holographic Microscopy4.6.7 Shearing Interferometry (Conoscopy)4.7 Wave Front Sensing (Shack-Hartmann)4.8 Deflectometry4.9 Makyoh Topography Sensor4.10 Surface Profiling Using Elastic Light Scattering4.10.1 Total Integrated Scattering (TIS)4.10.2 Angular Resolved Scattering (ARS)4.10.3 Speckle Based Roughness Determination4.11 Spectral Analysis and Characterization4.11.1 Reflectometry126.96.36.199 Optical Film Thickness Determination188.8.131.52 Critical Dimensions Determination4.11.2 Spectroscopic Ellipsometry5 Imaging Methods5.1 Classical Imaging5.2 Spectral Imaging5.3 Scanning Electron Microscopy5.4 Optical Coherence Tomography5.5 Terahertz Spectroscopy6 Multisensor - Systems - A Versatile Approach To Surface Metrology7 Appendices7.1 Appendix A: Numerics With Complex Numbers7.2 Appendix B: Levenberg-Marquardt Algorithm8 ReferencesIndex.
About the Author
Dr. habil. Michael Quinten is a senior staff member at FRT GmbH in Bergisch Gladbach, working as Head of R&D Sensors and Head of Technical Coordination. Previously he was project manager in development and product manager at the STEAG ETA-Optik GmbH in Heinsberg, Product Manager for Color and Coatings (Color measurement, coating thickness measurement and simulation), Spectrometry UV-VIS-NIR and Integrated Optics. He has been Research assistant at the Universities of Chemnitz TU, University of Saarland, Ruhr-University Bochum, RWTH Aachen and visiting professor at the Karl-Franzens-University Graz.